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- ANSYS Solutions Magazine: MEMS Modeling and Simulation (www.ansys.com) http://www.ansys.com/ansys/mems/repository.htm Part 1: Analyzing electrostatic-structural interactions in Micro Electro Mechanical Systems Vol. 3 No. 2 Part 2: Analyzing fluid-structural interactions Vol. 3 No. 3 Part 3: Exporting macromodals for circuit and system simulation tools Vol. 3 No. 4 - J. Mehner, W. Dötzel, B. Schauwecker, D. Ostergaard: Reduced Order Modeling of Fluid Structural Interactions in MEMS Based on Modal Projection Techniques, 12. Intern. Conf. on Solid State Sensors, Actuators and Microsystems, Boston 2003, pp. 1840-1843 Download: TRANS2003.pdf - B. Schauwecker, K. M. Strohm, W. Simon, J. Mehner, J.-F. Luy: A new type of high bandwidth RF MEMS switch - Toggle Switch, Journal of Semi- conductor Technology and Science, Special Issue on MEMS, Vol. 2, No. 4, pp. 237 - 245; December 2002 http://www.empire.de/ws_jss2002.pdf - F. Bennini, J. Mehner, W. Doetzel: A Modal Decomposition Technique for Fast Harmonic and Transient Simulations of MEMS, Proc. of the Int. MEMS Workshop iMEMS, Singapore, 2001, pp. 477-484 - J. Mehner, F. Bennini, W. Dötzel: CAD for Microelectromechanical Systems. System Design Automation - Fundamentals, Principles, Methods, Examples, pp. 111-132. Kluwer Academic Publishers, Boston 2000. - J. Mehner, L.D. Gabbay, S.D. Senturia: Computer-Aided Generation of Nonlinear Reduced-Oder Dynamic Macromodels, J. Microelectromech. Systems, Vol. 9, No. 2, 2000, pp. 270-277 Download: JMEMS2000.pdf Download: JMEMS2000a.pdf |