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Design case 1: Coupled Domain Simulations of MEMS Electrostatic and structural components of the Microswitch: The Microswitch is designed to open and close an electrical contact according to an external voltage signal. Beside to the initial position where the cantilever lies horizontally to the wafer surface, its tip can either be pulled down to the contact paddle or is pushed out of the wafer plane. In closed position the signal is routed from the flexible metal band across the cantilever to the contact. The torsion spring is made of silicone nitride for electrical insulation. First page    Previous page    Next page