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  Created by: Matti

Design case 1: Coupled Domain Simulations of MEMS

SEM photography:
SEM photography    SEM photography
(With courtesy of DaimlerChrysler Research Center Ulm)

MEMS technologies promote exciting advancements in the field of microwave switching
such as significant reduction of insertion loss, low signal distorsion and less energy con-
sumption for operation compared to semiconductor devices.

Above Microswitches developed at the DaimlerChrysler Research Center at Ulm consist of
a movable cantilever which directly opens and closes a signal line by ohmic contact. An
ohmic contact allows in closed position a transmission starting at DC which is of great ad-
vantage compared to shunt-switches where only a capacitive connection can be achieved.
A push-pull concept was intruduced for better performence at high fequencies.

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