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-  ANSYS Inc, Multiphysics Group http://www.ansys.com/ansys/mems/mems_key_features/key_feature_rom144.htm http://www.ansys.com/ansys/mems/mems_downloads/thermal_analogy_damping.pdf http://www.ansys.com/ansys/mems/mems_downloads/ansys_mems_8_0_customer_1.zip -  DaimlerChrysler Research Center, Ulm -  CADFEM GmbH http://www.cadfem.de/ -  Chemnitz University of Technology http://www.infotech.tu-chemnitz.de/~microsys/A1/A1.html http://www.infotech.tu-chemnitz.de/~microsys/A4/A4.html -  MEMCAD Group at the MIT http://www-mtl.mit.edu/MEMCAD/ http://www-mtl.mit.edu/mtlhome/6Res/AR1999/AR99-MEM.pdf http://www-mtl.mit.edu/mtlhome/6Res/AR2000/6MS/MSabs8.pdf -  InuTech GmbH http://www.inutech.de/ -  Adapted Solutions http://www.adapted-solutions.com/