Design case 1 Design case 2 Current projects Latest articles Partners About us Created by: Matti |
Design case 1: Coupled Domain Simulations of MEMS Finite element simulation results (static case): Finite element simulations are state of the art to capture second order effects such as non- linearities, initial pre-stress, electrostatic fringing fields and stress concentrations at notches of the clamp. First page Previous page Next page |