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  Created by: Matti

Design case 1: Coupled Domain Simulations of MEMS

Analytical model based on the theory of beams and plates:
Analytical model based on the theory of beams and plates

Analytical modeling of the Microswitch is complicated by the fact that the cantilever (Beam 2)
bends significantly under electrostatic load and the electrostatic pressure is strongly affected
by the local gap separation.

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