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Design case 2: Reduced Order Modeling of Coupled Systems Simulation results:    Influence of thermal and intrinsic stress Thermal and intrinsic stress might increase the gap separation at the pull down electrode. Consequently the driving voltages must be enlarged in order to drive the cantilever tip to the contact paddle. After a critical voltage level is reached the cantilever bends in the middle and snaps to the counter electrode (pull-in effect). First page    Previous page    Next page