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Design case 2: Reduced Order Modeling of Coupled Systems Simulation results:    Transient response after a voltage jump (lift up mode) Diameter and separation of the perforation holes are optimised for minimal switching time of the pull down mode. The lift up motion shown in above animation requires a larger settling time since the damping ratios are considerable lower caused by the increased gap between cantilever and substrate. Several oscillation cycles can be observed until the cantilever tip reaches the final position. First page    Previous page    Next page